Computational study on chemical mechanical polishing properties of perovskite oxide abrasive grain

Nobuki Ozawa, Miho Nakamura, Kentaro Kawaguchi, Takeshi Ishikawa, Yuji Higuchi, Momoji Kubo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication5th World Tribology Congress, WTC 2013
PublisherPolitecnico di Torino (DIMEAS)
Pages1915-1916
Number of pages2
ISBN (Electronic)9781634393522
Publication statusPublished - 2014 Jan 1
Event5th World Tribology Congress, WTC 2013 - Torino, Italy
Duration: 2013 Sep 82013 Sep 13

Publication series

Name5th World Tribology Congress, WTC 2013
Volume3

Other

Other5th World Tribology Congress, WTC 2013
CountryItaly
CityTorino
Period13/9/813/9/13

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Mechanical Engineering

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