TY - JOUR
T1 - Computational simulation of a particle-laden RF inductively coupled plasma with seeded potassium
AU - Shigeta, M.
AU - Sato, T.
AU - Nishiyama, H.
N1 - Funding Information:
This work was partly supported by a grant-in-aid for Scientific Research (B) from the Japan Society for Promotion Science (2001, 2002). This computational simulation was conducted under the collaboration research project (2002) using an Origin 2000 at the Advanced Fluid Information Research Center of the Institute of Fluid Science, Tohoku University, Japan.
Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2004/2
Y1 - 2004/2
N2 - In the present study, the plasma properties, the thermofluid fields and the induction electromagnetic fields and further the in-flight particle behaviors in the radio frequency inductively coupled plasma (RF-ICP), which is electrically enhanced by seeding potassium vapor, are investigated by computational simulation. Since an electrically enhanced plasma is also influenced considerably by the applied coil frequency, the plasma structure and the in-flight particle behaviors in seeding potassium vapor are correspondingly influenced and have distinctive profiles. Due to the electrical enhancement of RF-ICP with potassium seeding, the frequency effect on particle heating becomes more considerable.
AB - In the present study, the plasma properties, the thermofluid fields and the induction electromagnetic fields and further the in-flight particle behaviors in the radio frequency inductively coupled plasma (RF-ICP), which is electrically enhanced by seeding potassium vapor, are investigated by computational simulation. Since an electrically enhanced plasma is also influenced considerably by the applied coil frequency, the plasma structure and the in-flight particle behaviors in seeding potassium vapor are correspondingly influenced and have distinctive profiles. Due to the electrical enhancement of RF-ICP with potassium seeding, the frequency effect on particle heating becomes more considerable.
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U2 - 10.1016/j.ijheatmasstransfer.2003.08.007
DO - 10.1016/j.ijheatmasstransfer.2003.08.007
M3 - Article
AN - SCOPUS:0242426470
VL - 47
SP - 707
EP - 716
JO - International Journal of Heat and Mass Transfer
JF - International Journal of Heat and Mass Transfer
SN - 0017-9310
IS - 4
ER -