Computational simulation of a particle-laden RF inductively coupled plasma with seeded potassium

M. Shigeta, Takehiko Sato, Hideya Nishiyama

Research output: Contribution to journalArticlepeer-review

32 Citations (Scopus)

Abstract

In the present study, the plasma properties, the thermofluid fields and the induction electromagnetic fields and further the in-flight particle behaviors in the radio frequency inductively coupled plasma (RF-ICP), which is electrically enhanced by seeding potassium vapor, are investigated by computational simulation. Since an electrically enhanced plasma is also influenced considerably by the applied coil frequency, the plasma structure and the in-flight particle behaviors in seeding potassium vapor are correspondingly influenced and have distinctive profiles. Due to the electrical enhancement of RF-ICP with potassium seeding, the frequency effect on particle heating becomes more considerable.

Original languageEnglish
Pages (from-to)707-716
Number of pages10
JournalInternational Journal of Heat and Mass Transfer
Volume47
Issue number4
DOIs
Publication statusPublished - 2004 Jan 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes

Fingerprint Dive into the research topics of 'Computational simulation of a particle-laden RF inductively coupled plasma with seeded potassium'. Together they form a unique fingerprint.

Cite this