Computational simulation for planarization of glass Surface: Proposal of design principles for alternative abrasive grain of CeO2

Nobuki Ozawa, Miho Nakamura, Momoji Kubo

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)941-946
Number of pages6
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume78
Issue number11
DOIs
Publication statusPublished - 2012 Nov
Externally publishedYes

Keywords

  • Alternative abrasive grain
  • Chemical mechanical polishing
  • First-principles calculation
  • Molecular dynamics
  • Perovskite oxide

ASJC Scopus subject areas

  • Mechanical Engineering

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