Comprehensive study on chemical structures of compositional transition layer at SiO2/Si(100) interface

T. Suwa, Akinobu Teramoto, T. Muro, T. Kinoshita, S. Sugawa, Takeo Hattori, T. Ohmi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Comprehensive study on chemical structures of compositional transition layer at SiO<sub>2</sub>/Si(100) interface'. Together they form a unique fingerprint.

Engineering & Materials Science