Compound semiconductor micro/nanomechanics

Hiroshi Yamaguchi, Yoshiro Hirayama

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


We are studying the fusion of semiconductor quantum nanostructures and micro/nanomechanical systems. Mechanical systems are extremely sensitive to applied force and this feature can be used to achieve new functionality in semiconductor quantum nanostructure devices. Here we report displacement detection using a quantum mechanical electron interferometer and the fabrication of nanoscale conductive semiconductor cantilevers.

Original languageEnglish
Pages (from-to)25-30
Number of pages6
JournalNTT Technical Review
Issue number6
Publication statusPublished - 2004 Jun 1
Externally publishedYes

ASJC Scopus subject areas

  • Computer Science Applications
  • Computer Networks and Communications
  • Electrical and Electronic Engineering


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