We are studying the fusion of semiconductor quantum nanostructures and micro/nanomechanical systems. Mechanical systems are extremely sensitive to applied force and this feature can be used to achieve new functionality in semiconductor quantum nanostructure devices. Here we report displacement detection using a quantum mechanical electron interferometer and the fabrication of nanoscale conductive semiconductor cantilevers.
|Number of pages||6|
|Journal||NTT Technical Review|
|Publication status||Published - 2004 Jun 1|
ASJC Scopus subject areas
- Computer Science Applications
- Computer Networks and Communications
- Electrical and Electronic Engineering