Fingerprint
Dive into the research topics of 'Comparison of thermal and plasma oxidations for HfO <sub>2</sub> /Si interface'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Comparison of thermal and plasma oxidations for HfO 2 /Si interface
S. Hayashi, K. Yamamoto, Y. Harada, R. Mitsuhashi, K. Eriguchi, M. Kubota, M. Niwa
Research output: Contribution to journal › Article › peer-review
14
Citations
(Scopus)