Comparison of intrinsic zero-energy loss and Shirley-type background corrected profiles of XPS spectra for quantitative surface analysis: Study of Cr, Mn and Fe oxides

Masaoki Oku, Shigeru Suzuki, Naofumi Ohtsu, Toetsu Shishido, Kazuaki Wagatsuma

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)

Abstract

The intrinsic zero-energy loss profiles of transition metal 2p and 3p XPS spectra for Cr, Mn, and Fe oxides are obtained by spectral deconvolution and compared with Shirley-type background corrected profiles. The metal core level spectra are deconvoluted by O 1s spectra as the response function of each oxide. As the O 1s spectra include intrinsic and extrinsic energy loss parts, the background corrected core level spectra are zero-energy loss spectra. The good agreement of the deconvoluted spectra with the reported spectra obtained by the many body effect theory indicates that the background subtraction method is accurate. A comparison of the deconvoluted with the background corrected spectra of the Shirely-type subtraction reveals that almost all the spectra coincide with each other except for Fe 3p with α-Fe 2 O 3 . The good coincidence of the Shirley-type corrected spectra with the deconvoluted and calculated spectra indicates that Shirley-type background correction can be used for daily quantitative surface analysis.

Original languageEnglish
Pages (from-to)5141-5148
Number of pages8
JournalApplied Surface Science
Volume254
Issue number16
DOIs
Publication statusPublished - 2008 Jun 15

Keywords

  • Background correction
  • Core levels
  • Cr
  • Fe
  • Intrinsic zero-energy loss profiles
  • Mn
  • Oxides
  • Shirley-type
  • XPS

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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