Compact manipulator based on an atomic force microscope for multi-probe operation

Futoshi Iwata; Hideyuki Kou; Yuya Mizuguchi; So Ito; Hisayuki Aoyama; Tatsuo Ushiki

Compact manipulator based on an atomic force microscope for multi-probe operation

Futoshi Iwata, Hideyuki Kou, Yuya Mizuguchi, So Ito, Hisayuki Aoyama, Tatsuo Ushiki

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Proceedings - ASPE 2010 Annual Meeting
Pages	85-88
Number of pages	4
Publication status	Published - 2010
Event	25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010 - Atlanta, GA, United States Duration: 2010 Oct 31 → 2010 Nov 4

Publication series

Name	Proceedings - ASPE 2010 Annual Meeting
Volume	50

Other

Other	25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010
Country/Territory	United States
City	Atlanta, GA
Period	10/10/31 → 10/11/4

ASJC Scopus subject areas

Engineering (miscellaneous)

Cite this

Iwata, F, Kou, H, Mizuguchi, Y, Ito, S, Aoyama, H & Ushiki, T 2010, Compact manipulator based on an atomic force microscope for multi-probe operation. in Proceedings - ASPE 2010 Annual Meeting. Proceedings - ASPE 2010 Annual Meeting, vol. 50, pp. 85-88, 25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010, Atlanta, GA, United States, 10/10/31.

@inproceedings{e1d42345a8b0455eb002135a245f3183,

title = "Compact manipulator based on an atomic force microscope for multi-probe operation",

author = "Futoshi Iwata and Hideyuki Kou and Yuya Mizuguchi and So Ito and Hisayuki Aoyama and Tatsuo Ushiki",

year = "2010",

language = "English",

isbn = "9781887706568",

series = "Proceedings - ASPE 2010 Annual Meeting",

pages = "85--88",

booktitle = "Proceedings - ASPE 2010 Annual Meeting",

note = "25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010 ; Conference date: 31-10-2010 Through 04-11-2010",

}

TY - GEN

T1 - Compact manipulator based on an atomic force microscope for multi-probe operation

AU - Iwata, Futoshi

AU - Kou, Hideyuki

AU - Mizuguchi, Yuya

AU - Ito, So

AU - Aoyama, Hisayuki

AU - Ushiki, Tatsuo

PY - 2010

Y1 - 2010

UR - http://www.scopus.com/inward/record.url?scp=84884367875&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84884367875&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84884367875

SN - 9781887706568

T3 - Proceedings - ASPE 2010 Annual Meeting

SP - 85

EP - 88

BT - Proceedings - ASPE 2010 Annual Meeting

T2 - 25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010

Y2 - 31 October 2010 through 4 November 2010

ER -

Compact manipulator based on an atomic force microscope for multi-probe operation

Publication series

Other

ASJC Scopus subject areas

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Cite this