Compact manipulator based on an atomic force microscope for multi-probe operation

Futoshi Iwata, Hideyuki Kou, Yuya Mizuguchi, So Ito, Hisayuki Aoyama, Tatsuo Ushiki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationProceedings - ASPE 2010 Annual Meeting
Pages85-88
Number of pages4
Publication statusPublished - 2010
Event25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010 - Atlanta, GA, United States
Duration: 2010 Oct 312010 Nov 4

Publication series

NameProceedings - ASPE 2010 Annual Meeting
Volume50

Other

Other25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010
CountryUnited States
CityAtlanta, GA
Period10/10/3110/11/4

ASJC Scopus subject areas

  • Engineering (miscellaneous)

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