Fingerprint
Dive into the research topics of 'Commercial Production of Epitaxial PZT for Piezoelectric MEMS Applications'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Commercial Production of Epitaxial PZT for Piezoelectric MEMS Applications
Ryoma Miyake, Mario Kiuchi, Shinya Yoshida, Shuji Tanaka, Glen R. Fox
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
1
Citation
(Scopus)