Commercial Production of Epitaxial PZT for Piezoelectric MEMS Applications

Ryoma Miyake, Mario Kiuchi, Shinya Yoshida, Shuji Tanaka, Glen R. Fox

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A commercially produced monocrystalline-like epitaxial PZT film is described for piezoelectric MEMS applications. Films with a thickness of 1\ \mu \mathrm{m} to 2\ \mu \mathrm{m} exhibit a typical transverse piezoelectric d31 coefficient of -185 pm/V, relative dielectric permittivity of 430 and dielectric loss of 0.015. These films are commercially available for piezoelectric MEMS device development and production.

Original languageEnglish
Title of host publicationIFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728164304
DOIs
Publication statusPublished - 2020 Jul
Externally publishedYes
Event2020 Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, IFCS-ISAF 2020 - Virtual, Keystone, United States
Duration: 2020 Jul 192020 Jul 23

Publication series

NameIFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings

Conference

Conference2020 Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, IFCS-ISAF 2020
CountryUnited States
CityVirtual, Keystone
Period20/7/1920/7/23

Keywords

  • epitaxial
  • piezoelectric
  • PZT
  • sputtering
  • thin film

ASJC Scopus subject areas

  • Signal Processing
  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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