Combined device of optical microdisplacement sensor and PZT-actuated micromirror

K. Akase; R. Sawada; E. Higurashi; T. Kobayashi; R. Maeda; M. Inokuchi; S. Sanada; I. Ishikawa

doi:10.1109/OMEMS.2007.4373909

Combined device of optical microdisplacement sensor and PZT-actuated micromirror

K. Akase, R. Sawada, E. Higurashi, T. Kobayashi, R. Maeda, M. Inokuchi, S. Sanada, I. Ishikawa

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Citations (Scopus)

Abstract

A combined device of a PZT-film-actuated micromirror and microsensor that can detect linear movement and rotation angle of the mirror has been developed[1]. The micromirror is actuated by vertical movement of two PZT cantilevers formed as a unit on the right and left of the movable mirror and directly connected to it via hinges. By detecting reflected light diffused from a VCSEL (vertical-cavity surface-emitting laser) toward the mirror, using two photodiodes (one on each side), displacement and rotation angle are measured with high precision. Since this combined device can feed back the displacement and rotation angle obtained from the sensor, it can compensate for the hysteresis of PZT and therefore enable stable, high-precision optical beam control.

Original language	English
Title of host publication	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Pages	199-200
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2007.4373909
Publication status	Published - 2007
Externally published	Yes
Event	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan, Province of China Duration: 2007 Aug 12 → 2007 Aug 16

Publication series

Name	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

Other

Other	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Country/Territory	Taiwan, Province of China
City	Hualien
Period	07/8/12 → 07/8/16

Keywords

Microdisplacement sensor
Photodiode
PZT-actuated micromirror
VCSEL

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/OMEMS.2007.4373909

Cite this

Akase, K., Sawada, R., Higurashi, E., Kobayashi, T., Maeda, R., Inokuchi, M., Sanada, S., & Ishikawa, I. (2007). Combined device of optical microdisplacement sensor and PZT-actuated micromirror. In 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS (pp. 199-200). [4373909] (2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS). https://doi.org/10.1109/OMEMS.2007.4373909

Combined device of optical microdisplacement sensor and PZT-actuated micromirror. / Akase, K.; Sawada, R.; Higurashi, E. et al.

2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS. 2007. p. 199-200 4373909 (2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Akase, K, Sawada, R, Higurashi, E, Kobayashi, T, Maeda, R, Inokuchi, M, Sanada, S & Ishikawa, I 2007, Combined device of optical microdisplacement sensor and PZT-actuated micromirror. in 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS., 4373909, 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS, pp. 199-200, 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS, Hualien, Taiwan, Province of China, 07/8/12. https://doi.org/10.1109/OMEMS.2007.4373909

Akase K, Sawada R, Higurashi E, Kobayashi T, Maeda R, Inokuchi M et al. Combined device of optical microdisplacement sensor and PZT-actuated micromirror. In 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS. 2007. p. 199-200. 4373909. (2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS). doi: 10.1109/OMEMS.2007.4373909

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title = "Combined device of optical microdisplacement sensor and PZT-actuated micromirror",

abstract = "A combined device of a PZT-film-actuated micromirror and microsensor that can detect linear movement and rotation angle of the mirror has been developed[1]. The micromirror is actuated by vertical movement of two PZT cantilevers formed as a unit on the right and left of the movable mirror and directly connected to it via hinges. By detecting reflected light diffused from a VCSEL (vertical-cavity surface-emitting laser) toward the mirror, using two photodiodes (one on each side), displacement and rotation angle are measured with high precision. Since this combined device can feed back the displacement and rotation angle obtained from the sensor, it can compensate for the hysteresis of PZT and therefore enable stable, high-precision optical beam control.",

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author = "K. Akase and R. Sawada and E. Higurashi and T. Kobayashi and R. Maeda and M. Inokuchi and S. Sanada and I. Ishikawa",

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AB - A combined device of a PZT-film-actuated micromirror and microsensor that can detect linear movement and rotation angle of the mirror has been developed[1]. The micromirror is actuated by vertical movement of two PZT cantilevers formed as a unit on the right and left of the movable mirror and directly connected to it via hinges. By detecting reflected light diffused from a VCSEL (vertical-cavity surface-emitting laser) toward the mirror, using two photodiodes (one on each side), displacement and rotation angle are measured with high precision. Since this combined device can feed back the displacement and rotation angle obtained from the sensor, it can compensate for the hysteresis of PZT and therefore enable stable, high-precision optical beam control.

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Combined device of optical microdisplacement sensor and PZT-actuated micromirror

Abstract

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Keywords

ASJC Scopus subject areas

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