Combinatorial thin film synthesis and its high throughput screening for inorganic functional materials

Tetsuya Hasegawa, Tomoteru Fukumura

Research output: Contribution to journalReview article

1 Citation (Scopus)

Abstract

Combinatorial approach toward discovery of new functional materials and properties is a powerful method in fields of material science, because such approach can considerably decrease the time consumption for the discovery. Here, we focus on the combinaotorial approach to inorganic functional materials such as oxides, and review various studies on combinatorial thin film synthesis and high throughput screening techniques of structural, electric, magnetic, and optical properties.

Original languageEnglish
Pages (from-to)549-558
Number of pages10
JournalJournal of the Vacuum Society of Japan
Volume54
Issue number11
DOIs
Publication statusPublished - 2011 Dec 1
Externally publishedYes

ASJC Scopus subject areas

  • Materials Science(all)
  • Instrumentation
  • Surfaces and Interfaces
  • Spectroscopy

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