TY - GEN
T1 - Combinatorial synthesis study of passivation layers for solar cell applications
AU - Ikeno, N.
AU - Tachibana, T.
AU - Lee, H.
AU - Yoshida, H.
AU - Arafune, K.
AU - Satoh, S.
AU - Chikyow, T.
AU - Ogura, A.
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2012
Y1 - 2012
N2 - We investigated the new materials applicable for the field effect passivation layer in crystalline Si solar cells, ZrO2-Al2O3 and ZrO2-Y2O3 binary systems, by using combinatorial synthesis method. As-deposited samples indicated hysteresis curves and flat band-voltage (VFB) shifts at capacitance-voltage (C-V) measurements. After oxygen gas annealing (OGA) at 700°C for 5min,an improvement of the hysteresis and a positive shift of VFB were observed. OGA process influenced defects density related to decreasing oxygen vacancy. OGA processed ZrO2 incorporated with 20%Al2O3 and 15% Y2O3 structures showed the maximized negative fixed charge of -5.8 × 1012 cm-2 and-7.8 × 1012 cm-2 in each system, respectively, suggesting that the ZrO2 based alloy systems were revealed to be the promising material for the passivation in the solar cell application.
AB - We investigated the new materials applicable for the field effect passivation layer in crystalline Si solar cells, ZrO2-Al2O3 and ZrO2-Y2O3 binary systems, by using combinatorial synthesis method. As-deposited samples indicated hysteresis curves and flat band-voltage (VFB) shifts at capacitance-voltage (C-V) measurements. After oxygen gas annealing (OGA) at 700°C for 5min,an improvement of the hysteresis and a positive shift of VFB were observed. OGA process influenced defects density related to decreasing oxygen vacancy. OGA processed ZrO2 incorporated with 20%Al2O3 and 15% Y2O3 structures showed the maximized negative fixed charge of -5.8 × 1012 cm-2 and-7.8 × 1012 cm-2 in each system, respectively, suggesting that the ZrO2 based alloy systems were revealed to be the promising material for the passivation in the solar cell application.
KW - Combinatorial synthesis
KW - Fixed charge
KW - Photovoltaic
KW - Surface passivation
UR - http://www.scopus.com/inward/record.url?scp=84872436293&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84872436293&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/MSF.725.161
DO - 10.4028/www.scientific.net/MSF.725.161
M3 - Conference contribution
AN - SCOPUS:84872436293
SN - 9783037854426
T3 - Materials Science Forum
SP - 161
EP - 164
BT - Defects-Recognition, Imaging and Physics in Semiconductors XIV
PB - Trans Tech Publications Ltd
T2 - 14th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors, DRIP-14
Y2 - 25 September 2011 through 29 September 2011
ER -
