Combinatorial synthesis study of passivation layers for solar cell applications

N. Ikeno, T. Tachibana, H. Lee, H. Yoshida, K. Arafune, S. Satoh, T. Chikyow, A. Ogura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

We investigated the new materials applicable for the field effect passivation layer in crystalline Si solar cells, ZrO2-Al2O3 and ZrO2-Y2O3 binary systems, by using combinatorial synthesis method. As-deposited samples indicated hysteresis curves and flat band-voltage (VFB) shifts at capacitance-voltage (C-V) measurements. After oxygen gas annealing (OGA) at 700°C for 5min,an improvement of the hysteresis and a positive shift of VFB were observed. OGA process influenced defects density related to decreasing oxygen vacancy. OGA processed ZrO2 incorporated with 20%Al2O3 and 15% Y2O3 structures showed the maximized negative fixed charge of -5.8 × 1012 cm-2 and-7.8 × 1012 cm-2 in each system, respectively, suggesting that the ZrO2 based alloy systems were revealed to be the promising material for the passivation in the solar cell application.

Original languageEnglish
Title of host publicationDefects-Recognition, Imaging and Physics in Semiconductors XIV
PublisherTrans Tech Publications Ltd
Pages161-164
Number of pages4
ISBN (Print)9783037854426
DOIs
Publication statusPublished - 2012
Event14th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors, DRIP-14 - Miyazaki, Japan
Duration: 2011 Sep 252011 Sep 29

Publication series

NameMaterials Science Forum
Volume725
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Other

Other14th International Conference on Defects-Recognition, Imaging and Physics in Semiconductors, DRIP-14
CountryJapan
CityMiyazaki
Period11/9/2511/9/29

Keywords

  • Combinatorial synthesis
  • Fixed charge
  • Photovoltaic
  • Surface passivation

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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