Combinatorial synthesis of Li-doped NiO thin films and their transparent conducting properties

U. S. Joshi, Y. Matsumoto, K. Itaka, M. Sumiya, H. Koinuma

Research output: Contribution to journalConference articlepeer-review

75 Citations (Scopus)


Transparent and conductive oxide (TCO) thin films of Li-doped NiO were prepared by combinatorial pulsed laser deposition technique. Composition spread approach was applied to optimize the Li concentration for achieving high conductivity and transparency in the film. Conductivity of the composition spread film was found to increase almost linearly from nearly insulating to as high as 1.41 Ω -1 cm -1 with increasing Li content along a 9 mm long film. Optical transparency was found to decrease in an equal proportion across the 40 nm thick film with a slight shift in the absorption edge.

Original languageEnglish
Pages (from-to)2524-2528
Number of pages5
JournalApplied Surface Science
Issue number7
Publication statusPublished - 2006 Jan 21
Externally publishedYes
EventProceedings of the Third Japan-US Workshop on Combinatorial Material Science and Technology CMST-e SI -
Duration: 2004 Dec 72004 Dec 10


  • Combinatorial technology
  • Composition spread
  • PLD
  • Thin film
  • Transparent conductive oxides (TCO)

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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