Combinatorial optimization of atomically controlled growth for oxide films by the carrousel type laser molecular beam epitaxy

R. Takahashi, Y. Matsumoto, H. Koinuma, M. Lippmaa, M. Kawasaki

Research output: Contribution to journalConference articlepeer-review

11 Citations (Scopus)

Abstract

We have developed a new combinatorial technique, "carrousel deposition" for the atomically controlled growth of oxide films under in situ diagnostics of surface reaction with reflection high energy electron diffraction (RHEED). In this technique, a sequential fabrication of eight different films is performed in one experiment, enabling quick optimization of the growth conditions with the assistance of RHEED monitoring. Thus, we succeeded in the one lot optimization of the layer-by-layer SrO and BaO film growth on the B-site (TiO 2 ) terminated SrTiO 3 (0 0 1) substrate. Furthermore, the characteristic crystal habit in the initial growth of MO atomic layers on the SrTiO 3 substrate was elucidated to be dominated by the topmost atomic layer of the substrate or film and the atomic layer to be formed on it.

Original languageEnglish
Pages (from-to)532-535
Number of pages4
JournalApplied Surface Science
Volume197-198
DOIs
Publication statusPublished - 2002 Jan 1
Externally publishedYes
EventCola 2001 - Tsukuba, Japan
Duration: 2001 Oct 12001 Oct 1

Keywords

  • Combinatorial laser MBE
  • Crystal habit
  • Perovskite
  • RHEED

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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