Combinatorial materials exploration and composition tuning for the future gate stack structure

Toyohiro Chikyow, Ken Hasegawa, Tae Tamori, Kenji Ohmori, Naoto Umezawa, Kiyomi Nakajima, Keisaku Yamada, Hideomi Koinuma

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science