TY - GEN
T1 - Combinatorial fabrication and phase diagramming of ternary composition spreads
AU - Ahmet, Parhat
AU - Nagata, Takahiro
AU - Kukuruznyak, Dmitry Anatolyevich
AU - Ohmori, Kenji
AU - Kakushima, Kuniyuki
AU - Tsutsui, Kazuo
AU - Chikyow, Toyohiro
AU - Iwai, Hiroshi
PY - 2006
Y1 - 2006
N2 - A combinatorial fabrication method for three-component composition spread thin films was developed. Any desired specific part or a complete ternary diagram can be deposited onto a single substrate by sequentially ablating /sputtering target materials using a pulsed laser or an ion beam sputter. The developed deposition technique is useful for accurate determination of the structural and physical properties relations with composition in a film. The deposition technique also enables us to rapid establishing phase diagrams of ternary oxide and metal thin films.
AB - A combinatorial fabrication method for three-component composition spread thin films was developed. Any desired specific part or a complete ternary diagram can be deposited onto a single substrate by sequentially ablating /sputtering target materials using a pulsed laser or an ion beam sputter. The developed deposition technique is useful for accurate determination of the structural and physical properties relations with composition in a film. The deposition technique also enables us to rapid establishing phase diagrams of ternary oxide and metal thin films.
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M3 - Conference contribution
AN - SCOPUS:33748985839
SN - 1566774373
SN - 9781566774376
T3 - Proceedings - Electrochemical Society
SP - 215
EP - 224
BT - Proceedings of the 5th International Conference on Semiconductor Technology, ISTC 2006
T2 - 5th International Conference on Semiconductor Technology, ISTC 2006
Y2 - 21 March 2006 through 23 March 2006
ER -