Combinatorial fabrication and phase diagramming of ternary composition spreads

Parhat Ahmet; Takahiro Nagata; Dmitry Anatolyevich Kukuruznyak; Kenji Ohmori; Kuniyuki Kakushima; Kazuo Tsutsui; Toyohiro Chikyow; Hiroshi Iwai

Combinatorial fabrication and phase diagramming of ternary composition spreads

Parhat Ahmet, Takahiro Nagata, Dmitry Anatolyevich Kukuruznyak, Kenji Ohmori, Kuniyuki Kakushima, Kazuo Tsutsui, Toyohiro Chikyow, Hiroshi Iwai

Advanced Institute for Materials Research (AIMR)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A combinatorial fabrication method for three-component composition spread thin films was developed. Any desired specific part or a complete ternary diagram can be deposited onto a single substrate by sequentially ablating /sputtering target materials using a pulsed laser or an ion beam sputter. The developed deposition technique is useful for accurate determination of the structural and physical properties relations with composition in a film. The deposition technique also enables us to rapid establishing phase diagrams of ternary oxide and metal thin films.

Original language	English
Title of host publication	Proceedings of the 5th International Conference on Semiconductor Technology, ISTC 2006
Pages	215-224
Number of pages	10
Publication status	Published - 2006
Event	5th International Conference on Semiconductor Technology, ISTC 2006 - Shanghai, China Duration: 2006 Mar 21 → 2006 Mar 23

Publication series

Name	Proceedings - Electrochemical Society
Volume	PV 2006-03

Other

Other	5th International Conference on Semiconductor Technology, ISTC 2006
Country	China
City	Shanghai
Period	06/3/21 → 06/3/23

ASJC Scopus subject areas

Engineering(all)

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Combinatorial fabrication and phase diagramming of ternary composition spreads. / Ahmet, Parhat; Nagata, Takahiro; Kukuruznyak, Dmitry Anatolyevich; Ohmori, Kenji; Kakushima, Kuniyuki; Tsutsui, Kazuo; Chikyow, Toyohiro; Iwai, Hiroshi.

Proceedings of the 5th International Conference on Semiconductor Technology, ISTC 2006. 2006. p. 215-224 (Proceedings - Electrochemical Society; Vol. PV 2006-03).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ahmet, P, Nagata, T, Kukuruznyak, DA, Ohmori, K, Kakushima, K, Tsutsui, K, Chikyow, T & Iwai, H 2006, Combinatorial fabrication and phase diagramming of ternary composition spreads. in Proceedings of the 5th International Conference on Semiconductor Technology, ISTC 2006. Proceedings - Electrochemical Society, vol. PV 2006-03, pp. 215-224, 5th International Conference on Semiconductor Technology, ISTC 2006, Shanghai, China, 06/3/21.

Ahmet, Parhat ; Nagata, Takahiro ; Kukuruznyak, Dmitry Anatolyevich ; Ohmori, Kenji ; Kakushima, Kuniyuki ; Tsutsui, Kazuo ; Chikyow, Toyohiro ; Iwai, Hiroshi. / Combinatorial fabrication and phase diagramming of ternary composition spreads. Proceedings of the 5th International Conference on Semiconductor Technology, ISTC 2006. 2006. pp. 215-224 (Proceedings - Electrochemical Society).

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AU - Nagata, Takahiro

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AU - Ohmori, Kenji

AU - Kakushima, Kuniyuki

AU - Tsutsui, Kazuo

AU - Chikyow, Toyohiro

AU - Iwai, Hiroshi

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