Combinatorial fabrication and phase diagramming of ternary composition spreads

Parhat Ahmet, Takahiro Nagata, Dmitry Anatolyevich Kukuruznyak, Kenji Ohmori, Kuniyuki Kakushima, Kazuo Tsutsui, Toyohiro Chikyow, Hiroshi Iwai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A combinatorial fabrication method for three-component composition spread thin films was developed. Any desired specific part or a complete ternary diagram can be deposited onto a single substrate by sequentially ablating /sputtering target materials using a pulsed laser or an ion beam sputter. The developed deposition technique is useful for accurate determination of the structural and physical properties relations with composition in a film. The deposition technique also enables us to rapid establishing phase diagrams of ternary oxide and metal thin films.

Original languageEnglish
Title of host publicationProceedings of the 5th International Conference on Semiconductor Technology, ISTC 2006
Pages215-224
Number of pages10
Publication statusPublished - 2006
Event5th International Conference on Semiconductor Technology, ISTC 2006 - Shanghai, China
Duration: 2006 Mar 212006 Mar 23

Publication series

NameProceedings - Electrochemical Society
VolumePV 2006-03

Other

Other5th International Conference on Semiconductor Technology, ISTC 2006
CountryChina
CityShanghai
Period06/3/2106/3/23

ASJC Scopus subject areas

  • Engineering(all)

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