Combinatorial fabrication and characterization of oxide and metal thin film composition spreads

Parhat Ahmet; Takahiro Nagata; Dmitry Anatolyevich Kukuruznyak; Kenji Ohmori; Kuniyuki Kakushima; Kazuo Tsutsui; Toyohiro Chikyow; Hiroshi Iwai

Combinatorial fabrication and characterization of oxide and metal thin film composition spreads

Parhat Ahmet, Takahiro Nagata, Dmitry Anatolyevich Kukuruznyak, Kenji Ohmori, Kuniyuki Kakushima, Kazuo Tsutsui, Toyohiro Chikyow, Hiroshi Iwai

Advanced Institute for Materials Research (AIMR)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A combinatorial fabrication method for binary composition spread and three-component composition spread thin films was developed. Any desired specific part or a complete binary/ternary diagram can be deposited onto a single substrate by sequentially ablating/sputtering target materials using a pulsed laser or an ion beam sputter. The developed deposition technique is useful for accurate determination of the structural and physical properties relations with composition in a film. The deposition technique also enables us to rapid establishing phase diagrams of binary/ternary oxide and metal thin films. Copyright The Electrochemical Society.

Original language	English
Title of host publication	Dielectrics for Nanosystems II
Subtitle of host publication	Materials Science, Processing, Reliability, and Manufacturing
Pages	79-90
Number of pages	12
Edition	1
Publication status	Published - 2006
Event	2nd International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability, and Manufacturing - 209th Meeting of the Electrochemical Society - Denver, CO, United States Duration: 2006 May 7 → 2006 May 12

Publication series

Name	ECS Transactions
Number	1
Volume	2
ISSN (Print)	1938-5862
ISSN (Electronic)	1938-6737

Other

Other	2nd International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability, and Manufacturing - 209th Meeting of the Electrochemical Society
Country	United States
City	Denver, CO
Period	06/5/7 → 06/5/12

ASJC Scopus subject areas

Engineering(all)

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Combinatorial fabrication and characterization of oxide and metal thin film composition spreads. / Ahmet, Parhat; Nagata, Takahiro; Kukuruznyak, Dmitry Anatolyevich; Ohmori, Kenji; Kakushima, Kuniyuki; Tsutsui, Kazuo; Chikyow, Toyohiro; Iwai, Hiroshi.

Dielectrics for Nanosystems II: Materials Science, Processing, Reliability, and Manufacturing. 1. ed. 2006. p. 79-90 (ECS Transactions; Vol. 2, No. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ahmet, P, Nagata, T, Kukuruznyak, DA, Ohmori, K, Kakushima, K, Tsutsui, K, Chikyow, T & Iwai, H 2006, Combinatorial fabrication and characterization of oxide and metal thin film composition spreads. in Dielectrics for Nanosystems II: Materials Science, Processing, Reliability, and Manufacturing. 1 edn, ECS Transactions, no. 1, vol. 2, pp. 79-90, 2nd International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability, and Manufacturing - 209th Meeting of the Electrochemical Society, Denver, CO, United States, 06/5/7.

Ahmet, Parhat ; Nagata, Takahiro ; Kukuruznyak, Dmitry Anatolyevich ; Ohmori, Kenji ; Kakushima, Kuniyuki ; Tsutsui, Kazuo ; Chikyow, Toyohiro ; Iwai, Hiroshi. / Combinatorial fabrication and characterization of oxide and metal thin film composition spreads. Dielectrics for Nanosystems II: Materials Science, Processing, Reliability, and Manufacturing. 1. ed. 2006. pp. 79-90 (ECS Transactions; 1).

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author = "Parhat Ahmet and Takahiro Nagata and Kukuruznyak, {Dmitry Anatolyevich} and Kenji Ohmori and Kuniyuki Kakushima and Kazuo Tsutsui and Toyohiro Chikyow and Hiroshi Iwai",

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