TY - GEN
T1 - Combinatorial fabrication and characterization of oxide and metal thin film composition spreads
AU - Ahmet, Parhat
AU - Nagata, Takahiro
AU - Kukuruznyak, Dmitry Anatolyevich
AU - Ohmori, Kenji
AU - Kakushima, Kuniyuki
AU - Tsutsui, Kazuo
AU - Chikyow, Toyohiro
AU - Iwai, Hiroshi
PY - 2006
Y1 - 2006
N2 - A combinatorial fabrication method for binary composition spread and three-component composition spread thin films was developed. Any desired specific part or a complete binary/ternary diagram can be deposited onto a single substrate by sequentially ablating/sputtering target materials using a pulsed laser or an ion beam sputter. The developed deposition technique is useful for accurate determination of the structural and physical properties relations with composition in a film. The deposition technique also enables us to rapid establishing phase diagrams of binary/ternary oxide and metal thin films. Copyright The Electrochemical Society.
AB - A combinatorial fabrication method for binary composition spread and three-component composition spread thin films was developed. Any desired specific part or a complete binary/ternary diagram can be deposited onto a single substrate by sequentially ablating/sputtering target materials using a pulsed laser or an ion beam sputter. The developed deposition technique is useful for accurate determination of the structural and physical properties relations with composition in a film. The deposition technique also enables us to rapid establishing phase diagrams of binary/ternary oxide and metal thin films. Copyright The Electrochemical Society.
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M3 - Conference contribution
AN - SCOPUS:33745443793
SN - 1566774381
SN - 9781566774383
T3 - ECS Transactions
SP - 79
EP - 90
BT - Dielectrics for Nanosystems II
T2 - 2nd International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability, and Manufacturing - 209th Meeting of the Electrochemical Society
Y2 - 7 May 2006 through 12 May 2006
ER -