Combinatorial fabrication and characterization of oxide and metal thin film composition spreads

Parhat Ahmet; Takahiro Nagata; Dmitry Anatolyevich Kukuruznyak; Kenji Ohmori; Kuniyuki Kakushima; Kazuo Tsutsui; Toyohiro Chikyow; Hiroshi Iwai

Combinatorial fabrication and characterization of oxide and metal thin film composition spreads

Parhat Ahmet, Takahiro Nagata, Dmitry Anatolyevich Kukuruznyak, Kenji Ohmori, Kuniyuki Kakushima, Kazuo Tsutsui, Toyohiro Chikyow, Hiroshi Iwai

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A combinatorial fabrication method for binary composition spread and three-component composition spread thin films was developed. Any desired specific part or a complete binary/ternary diagram can be deposited onto a single substrate by sequentially ablating/sputtering target materials using a pulsed laser or an ion beam sputter. The developed deposition technique is useful for accurate determination of the structural and physical properties relations with composition in a film. The deposition technique also enables us to rapid establishing phase diagrams of binary/ternary oxide and metal thin films. Copyright The Electrochemical Society.

Original language	English
Title of host publication	Dielectrics for Nanosystems II
Subtitle of host publication	Materials Science, Processing, Reliability, and Manufacturing
Publisher	Electrochemical Society Inc.
Pages	79-90
Number of pages	12
Edition	1
ISBN (Electronic)	1566774381
ISBN (Print)	1566774381, 9781566774383
Publication status	Published - 2006
Externally published	Yes
Event	2nd International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability, and Manufacturing - 209th Meeting of the Electrochemical Society - Denver, CO, United States Duration: 2006 May 7 → 2006 May 12

Publication series

Name	ECS Transactions
Number	1
Volume	2
ISSN (Print)	1938-5862
ISSN (Electronic)	1938-6737

Other

Other	2nd International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability, and Manufacturing - 209th Meeting of the Electrochemical Society
Country/Territory	United States
City	Denver, CO
Period	06/5/7 → 06/5/12

ASJC Scopus subject areas

Engineering(all)

Cite this

Ahmet, P., Nagata, T., Kukuruznyak, D. A., Ohmori, K., Kakushima, K., Tsutsui, K., Chikyow, T., & Iwai, H. (2006). Combinatorial fabrication and characterization of oxide and metal thin film composition spreads. In Dielectrics for Nanosystems II: Materials Science, Processing, Reliability, and Manufacturing (1 ed., pp. 79-90). (ECS Transactions; Vol. 2, No. 1). Electrochemical Society Inc..

Combinatorial fabrication and characterization of oxide and metal thin film composition spreads. / Ahmet, Parhat; Nagata, Takahiro; Kukuruznyak, Dmitry Anatolyevich et al.

Dielectrics for Nanosystems II: Materials Science, Processing, Reliability, and Manufacturing. 1. ed. Electrochemical Society Inc., 2006. p. 79-90 (ECS Transactions; Vol. 2, No. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ahmet, P, Nagata, T, Kukuruznyak, DA, Ohmori, K, Kakushima, K, Tsutsui, K, Chikyow, T & Iwai, H 2006, Combinatorial fabrication and characterization of oxide and metal thin film composition spreads. in Dielectrics for Nanosystems II: Materials Science, Processing, Reliability, and Manufacturing. 1 edn, ECS Transactions, no. 1, vol. 2, Electrochemical Society Inc., pp. 79-90, 2nd International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability, and Manufacturing - 209th Meeting of the Electrochemical Society, Denver, CO, United States, 06/5/7.

@inproceedings{48d9dd5debe94e478dd1fb84fcccd1ca,

title = "Combinatorial fabrication and characterization of oxide and metal thin film composition spreads",

abstract = "A combinatorial fabrication method for binary composition spread and three-component composition spread thin films was developed. Any desired specific part or a complete binary/ternary diagram can be deposited onto a single substrate by sequentially ablating/sputtering target materials using a pulsed laser or an ion beam sputter. The developed deposition technique is useful for accurate determination of the structural and physical properties relations with composition in a film. The deposition technique also enables us to rapid establishing phase diagrams of binary/ternary oxide and metal thin films. Copyright The Electrochemical Society.",

author = "Parhat Ahmet and Takahiro Nagata and Kukuruznyak, {Dmitry Anatolyevich} and Kenji Ohmori and Kuniyuki Kakushima and Kazuo Tsutsui and Toyohiro Chikyow and Hiroshi Iwai",

year = "2006",

language = "English",

isbn = "1566774381",

series = "ECS Transactions",

publisher = "Electrochemical Society Inc.",

number = "1",

pages = "79--90",

booktitle = "Dielectrics for Nanosystems II",

edition = "1",

note = "2nd International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability, and Manufacturing - 209th Meeting of the Electrochemical Society ; Conference date: 07-05-2006 Through 12-05-2006",

}

TY - GEN

T1 - Combinatorial fabrication and characterization of oxide and metal thin film composition spreads

AU - Ahmet, Parhat

AU - Nagata, Takahiro

AU - Kukuruznyak, Dmitry Anatolyevich

AU - Ohmori, Kenji

AU - Kakushima, Kuniyuki

AU - Tsutsui, Kazuo

AU - Chikyow, Toyohiro

AU - Iwai, Hiroshi

PY - 2006

Y1 - 2006

N2 - A combinatorial fabrication method for binary composition spread and three-component composition spread thin films was developed. Any desired specific part or a complete binary/ternary diagram can be deposited onto a single substrate by sequentially ablating/sputtering target materials using a pulsed laser or an ion beam sputter. The developed deposition technique is useful for accurate determination of the structural and physical properties relations with composition in a film. The deposition technique also enables us to rapid establishing phase diagrams of binary/ternary oxide and metal thin films. Copyright The Electrochemical Society.

AB - A combinatorial fabrication method for binary composition spread and three-component composition spread thin films was developed. Any desired specific part or a complete binary/ternary diagram can be deposited onto a single substrate by sequentially ablating/sputtering target materials using a pulsed laser or an ion beam sputter. The developed deposition technique is useful for accurate determination of the structural and physical properties relations with composition in a film. The deposition technique also enables us to rapid establishing phase diagrams of binary/ternary oxide and metal thin films. Copyright The Electrochemical Society.

UR - http://www.scopus.com/inward/record.url?scp=33745443793&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33745443793&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:33745443793

SN - 1566774381

SN - 9781566774383

T3 - ECS Transactions

SP - 79

EP - 90

BT - Dielectrics for Nanosystems II

PB - Electrochemical Society Inc.

T2 - 2nd International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability, and Manufacturing - 209th Meeting of the Electrochemical Society

Y2 - 7 May 2006 through 12 May 2006

ER -

Combinatorial fabrication and characterization of oxide and metal thin film composition spreads

Abstract

Publication series

Other

ASJC Scopus subject areas

Other files and links

Fingerprint

Cite this