Combinatorial analysis of plasma-surface interactions of poly(ethylene terephthalate) with X-ray photoelectron spectroscopy

Kosuke Takenaka, Ken Cho, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Combinatorial analysis has been demonstrated for the examination of plasma-surface interactions of poly(ethylene terephthalate) (PET) in terms of chemical bonding state, with X-ray photoelectron spectroscopy (XPS). The chemical bonding states have been investigated for PET films exposed to an argon-oxygen mixture plasma with a density gradient sustained with RF power of 88, 175, and 350 W. The XPS results obtained from three batches of experiments showed a slight increase in the bond peaks caused by the oxidation of which PET with an increase in the product of (ion saturation current) δ (plasma exposure time), corresponds to ion dose.

Original languageEnglish
Article number08JA02
JournalJapanese journal of applied physics
Volume49
Issue number8 PART 2
DOIs
Publication statusPublished - 2010 Aug 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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