A good temperature coefficient of frequency (TCF) and an appropriate electromechanical coupling are required for applications of surface acoustic wave (SAW) devices requiring specific bandwidth. The combination of ZnO film having a negative TCF and a quartz substrate having an appropriate positive TCF, with selection of appropriate cutting and propagation angles of the substrate was studied theoretically and experimentally. The resulting structure has an appropriate electromechanical coupling factor, a good TCF, and a zero power flow angle using an ST-cut 35°X propagation quartz substrates.
|Number of pages||6|
|Journal||Proceedings of the IEEE Ultrasonics Symposium|
|Publication status||Published - 1997 Dec 1|
|Event||Proceedings of the 1997 IEEE Ultrasonics Symposium. Part 1 (of 2) - Toronto, Can|
Duration: 1997 Oct 5 → 1997 Oct 8
ASJC Scopus subject areas
- Acoustics and Ultrasonics