Combination of ZnO film and quartz to realize large coupling factor and excellent temperature coefficient for SAW devices

Michio Kadota

Research output: Contribution to journalConference article

19 Citations (Scopus)

Abstract

A good temperature coefficient of frequency (TCF) and an appropriate electromechanical coupling are required for applications of surface acoustic wave (SAW) devices requiring specific bandwidth. The combination of ZnO film having a negative TCF and a quartz substrate having an appropriate positive TCF, with selection of appropriate cutting and propagation angles of the substrate was studied theoretically and experimentally. The resulting structure has an appropriate electromechanical coupling factor, a good TCF, and a zero power flow angle using an ST-cut 35°X propagation quartz substrates.

Original languageEnglish
Pages (from-to)261-266
Number of pages6
JournalProceedings of the IEEE Ultrasonics Symposium
Volume1
Publication statusPublished - 1997 Dec 1
EventProceedings of the 1997 IEEE Ultrasonics Symposium. Part 1 (of 2) - Toronto, Can
Duration: 1997 Oct 51997 Oct 8

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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