Combination of high-resolution RBS and angle-resolved XPS: Accurate depth profiling of chemical states

Kenji Kimura, Kaoru Nakajima, Ming Zhao, Hiroshi Nohira, Takeo Hattori, Masaaki Kobata, Eiji Ikenaga, Jung Jin Kim, Keisuke Kobayashi, Thierry Conard, Wilfried Vandervorst

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Combination of high-resolution RBS and angle-resolved XPS: Accurate depth profiling of chemical states'. Together they form a unique fingerprint.

Physics

Chemistry

Material Science