Comb-shape step formation on Si(001)-2 × 1 surface

Tadahiro Komeda, Yasushiro Nishioka

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

We report about the formation of grating-like 2 × 1 and 1 × 2 domain structures, where stripe-shape mounds and troughs with monoatomic step height difference appear alternately and cover the entire terrace part with quite uniform periodicity, on Si(001) wafer which has very small miscut angle and high P dopant concentration. The mechanism of the formation of such stripe-shape domains was considered as the combination of the very wide terrace width, and the segregation of the dopant P in the surface cleaning process. The former is due to the expansion of 2 × 1 single domain which contains surface tensile stress perpendicular to the dimer rows formed by dimers. The latter increased the surface stresses by replacing the Si-Si dimers with P-P or P-Si dimers which have a shorter dimer bond length.

Original languageEnglish
Pages (from-to)20-25
Number of pages6
JournalApplied Surface Science
Volume117-118
DOIs
Publication statusPublished - 1997 Jun 2
Externally publishedYes

Keywords

  • Dopant segregation
  • STM
  • Si(001)
  • Step structures

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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