Columnar Structure in Continuously Sputtered Co—Cr Films

Y. Tanaka, H. Ito, T. Sonoda, R. Nishikawa

Research output: Contribution to journalArticlepeer-review

Abstract

Co-Cr films were continuously formed on a substrate film in motion by DC planar magnetron sputtering, and the effect on the columnar microstructure of films was investigated. Columnar grains were bow-shaped owing to the change in angle of incidence ϕ of sputtered particles, in contrast with films formed on a stationary substrate; but the extent of change in ϕ had little effect. These results can be approximated using a vector sum representing sputtering from two line sources.

Original languageEnglish
Pages (from-to)1036-1038
Number of pages3
JournalIEEE Translation Journal on Magnetics in Japan
Volume2
Issue number11
DOIs
Publication statusPublished - 1987 Nov
Externally publishedYes

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Engineering(all)

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