Co-Cr films were continuously formed on a substrate film in motion by DC planar magnetron sputtering, and the effect on the columnar microstructure of films was investigated. Columnar grains were bow-shaped owing to the change in angle of incidence ϕ of sputtered particles, in contrast with films formed on a stationary substrate; but the extent of change in ϕ had little effect. These results can be approximated using a vector sum representing sputtering from two line sources.
ASJC Scopus subject areas
- Engineering (miscellaneous)