(Co-Ti-O)/Bi-Ti-O multilayer films with high-frequency electromagnetic response

Hanae Kijima, Yiwen Zhang, Nobukiyo Kobayashi, Shigehiro Ohnuma, Paul Muralt, Nava Setter, Hiroshi Masumoto

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4 Citations (Scopus)


A series of (Co-Ti-O)/Bi-Ti-O multilayer films with 1-65 Co-Ti-O magnetic layers (MLs) are prepared by tandem sputtering method. The effects of the multilayers on the electromagnetic responses were investigated in the frequency range from 0.1 to 10 GHz. The multilayer films demonstrate soft-magnetic performance, maintain low loss of permeability (μ) up to a few GHz, and exhibit a clear peak of μ″ at their resonance frequency (f r). fr increase from 1.9 to 4.7 GHz with increasing MLs from 1 to 65. The multilayer films show a notable indentation of susceptance (B) at approximately fr, which is not observed in a Bi-Ti-O monolayer film.

Original languageEnglish
Article number09KA14
JournalJapanese journal of applied physics
Issue number9 PART2
Publication statusPublished - 2013 Sep

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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