CMOS-on-LTCC integrated fingertip sensor with 3-axis tactile and thermal sensation for robots

Sho Asano, Masanori Muroyama, Takahiro Nakayama, Yoshiyuki Hata, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper reports a fully-integrated, small-footprint fingertip sensor, which allows robots to have 3-axis tactile and thermal sensation. The 3-axis capacitive force sensor is integrated with our original sensor platform CMOS-LSI (sensor platform LSI) including a diode-based temperature sensor. The LSI offers flexible configurability, and the force sensitivity and the sample rate were configured for this fingertip application. The materials of objects were successfully identified by measuring temperature change under the control of contact force. Fitting by a theoretical thermal model was conducted to extract contact resistance, thermal conductivity and thermal capacitance.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages516-519
Number of pages4
ISBN (Electronic)9781538627310
DOIs
Publication statusPublished - 2017 Jul 26
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 2017 Jun 182017 Jun 22

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

Keywords

  • Capacitive force sensor
  • Fingertip sensor
  • Low temperature cofired ceramic (LTCC)
  • MEMS-CMOS integration
  • Sensor platform LSI
  • Tactile sensor
  • Thermal sensing

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

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  • Cite this

    Asano, S., Muroyama, M., Nakayama, T., Hata, Y., & Tanaka, S. (2017). CMOS-on-LTCC integrated fingertip sensor with 3-axis tactile and thermal sensation for robots. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 516-519). [7994099] (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994099