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Clear difference between the chemical structure of SiO2/Si interfaces formed using oxygen radicals versus oxygen molecules
Tomoyuki Suwa, Yuki Kumagai, Akinobu Teramoto, Takayuki Muro, Toyohiko Kinoshita, Tadahiro Ohmi, Takeo Hattori
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
1
Citation
(Scopus)