Clear difference between the chemical structure of SiO2/Si interfaces formed using oxygen radicals versus oxygen molecules

Tomoyuki Suwa; Yuki Kumagai; Akinobu Teramoto; Takayuki Muro; Toyohiko Kinoshita; Tadahiro Ohmi; Takeo Hattori

doi:10.1149/1.3572279

Clear difference between the chemical structure of SiO₂/Si interfaces formed using oxygen radicals versus oxygen molecules

Tomoyuki Suwa, Yuki Kumagai, Akinobu Teramoto, Takayuki Muro, Toyohiko Kinoshita, Tadahiro Ohmi, Takeo Hattori

New Industry Creation Hatchery Center (NICHe)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

Soft-x-ray-excited angle-resolved photoelectron spectroscopy studies on silicon dioxide films formed using oxygen radicals (OR) versus oxygen molecules (OM) are reported. Most of intermediate oxidation states of Si, so called suboxides, consisting of Si³⁺, Si²⁺, and Si¹⁺ are localized at and near the SiO₂/Si interfaces. The suboxides formed utilizing OM are located extremely close to the interfaces, while suboxides formed utilizing OR are located not only at the interface but also in the Si substrate. This implies the penetration of a part of OR into the Si substrate to form Si¹⁺ and to relax the interfacial stress. Intermediate chemical bonding states of Si are formed in Si substrate closer to the interface as compared with those formed utilizing OM. This implies that the interfacial stress in the former is smaller than that in the latter.

Original language	English
Title of host publication	Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 11
Publisher	Electrochemical Society Inc.
Pages	115-122
Number of pages	8
Edition	4
ISBN (Electronic)	9781607682158
ISBN (Print)	9781566778657
DOIs	https://doi.org/10.1149/1.3572279
Publication status	Published - 2011

Publication series

Name	ECS Transactions
Number	4
Volume	35
ISSN (Print)	1938-5862
ISSN (Electronic)	1938-6737

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1149/1.3572279

Cite this

Suwa, T., Kumagai, Y., Teramoto, A., Muro, T., Kinoshita, T., Ohmi, T., & Hattori, T. (2011). Clear difference between the chemical structure of SiO₂/Si interfaces formed using oxygen radicals versus oxygen molecules. In Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 11 (4 ed., pp. 115-122). (ECS Transactions; Vol. 35, No. 4). Electrochemical Society Inc.. https://doi.org/10.1149/1.3572279

Clear difference between the chemical structure of SiO₂/Si interfaces formed using oxygen radicals versus oxygen molecules. / Suwa, Tomoyuki; Kumagai, Yuki; Teramoto, Akinobu et al.

Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 11. 4. ed. Electrochemical Society Inc., 2011. p. 115-122 (ECS Transactions; Vol. 35, No. 4).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Suwa, T, Kumagai, Y, Teramoto, A, Muro, T, Kinoshita, T, Ohmi, T & Hattori, T 2011, Clear difference between the chemical structure of SiO₂/Si interfaces formed using oxygen radicals versus oxygen molecules. in Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 11. 4 edn, ECS Transactions, no. 4, vol. 35, Electrochemical Society Inc., pp. 115-122. https://doi.org/10.1149/1.3572279

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