Circular multilayer zone plate for high-energy x-ray nano-imaging

Takahisa Koyama, Hidekazu Takano, Shigeki Konishi, Takuya Tsuji, Hisataka Takenaka, Satoshi Ichimaru, Tadayuki Ohchi, Yasushi Kagoshima

Research output: Contribution to journalReview articlepeer-review

28 Citations (Scopus)

Abstract

A circular multilayer zone plate (MZP) was fabricated and its focusing performance was evaluated using 20-keV x-rays. MoSi 2 and Si layers were alternately deposited by DC magnetron sputtering on a wire core; all the interfaces satisfied the Fresnel zone condition. The measured line spread function was converted to a point spread function by tomographic reconstruction. The results suggest that the MZP has the potential to realize the diffraction-limited resolving power, which is calculated to be 35 nm using the diffraction integral. Furthermore, scanning transmission microscopy using the MZP could resolve a 50-nm line-and-space pattern.

Original languageEnglish
Article number013705
JournalReview of Scientific Instruments
Volume83
Issue number1
DOIs
Publication statusPublished - 2012 Jan
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

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