The relative density of chlorine molecular ions (Cl2+) was measured in both continuous-wave (cw) and time-modulated inductively coupled chlorine plasma by the laser-induced fluorescence technique. The Cl2+ density was modulated by 30% under a modulation frequency of 100 kHz. At high rf power, the Cl2+ density in the time-modulated plasma was found to be higher than that in the cw plasma. In addition, the Doppler profile of Cl2+ was measured to evaluate Cl2+ temperature.
ASJC Scopus subject areas
- Condensed Matter Physics