Chlorine molecular ions measured in time-modulated inductively coupled plasma by the laser-induced fluorescence technique

S. Kumagai, M. Sasaki, M. Koyanagi, K. Hane

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The relative density of chlorine molecular ions (Cl2+) was measured in both continuous-wave (cw) and time-modulated inductively coupled chlorine plasma by the laser-induced fluorescence technique. The Cl2+ density was modulated by 30% under a modulation frequency of 100 kHz. At high rf power, the Cl2+ density in the time-modulated plasma was found to be higher than that in the cw plasma. In addition, the Doppler profile of Cl2+ was measured to evaluate Cl2+ temperature.

Original languageEnglish
Pages (from-to)205-210
Number of pages6
JournalPlasma Sources Science and Technology
Volume10
Issue number2
DOIs
Publication statusPublished - 2001 May 1

ASJC Scopus subject areas

  • Condensed Matter Physics

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