Chip-level warp control of SOI 3-axis accelerometer with the zigzag-shaped z-electrode

Y. Nonomura, Y. Omura, H. Funabashi, T. Akashi, M. Fujiyoshi, Y. Hata, T. Nakayama, Masayoshi Esashi

Research output: Contribution to journalConference article

3 Citations (Scopus)

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Engineering & Materials Science