Chemisorption of chlorine on Si(111) 7 × 7 and 1 × 1 surfaces

K. C. Pandey, T. Sakurai, H. D. Hagstrum

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    63 Citations (Scopus)


    Using ultraviolet photoemission spectroscopy (UPS) in conjunction with theoretical calculations, we have studied the reaction of gaseous chlorine with Si(111) 7 × 7 and 1 × 1 surfaces. The UPS spectra of the two chlorine saturated surfaces are very similar and consist of four peaks, a sharp main peak at -10.7 eV and smaller ones at -7.5, -13.0, and -15.7 eV relative to vacuum level. Both the peak positions and their relative intensities are in quantitative agreement with a theoretical calculation for a structural model in which a single chlorine atom sits on top of each surface Si atom, indicating that Cl2 decomposes at the surface to make strong covalent bonds with Si.

    Original languageEnglish
    Pages (from-to)3648-3651
    Number of pages4
    JournalPhysical Review B
    Issue number8
    Publication statusPublished - 1977

    ASJC Scopus subject areas

    • Condensed Matter Physics


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