Chemical Vapor Deposition of Iridium, Platinum, Rhodium and Palladium

J. R. Vargas Garcia, Takashi Goto

Research output: Contribution to journalReview articlepeer-review

102 Citations (Scopus)

Abstract

This article reviews the progress in the chemical vapor deposition of iridium, platinum, rhodium and palladium metals. In the course of the last decade the number of articles on CVD of this group of metals has increased significantly. A wide variety of metal organic complexes have been investigated as potential precursors and appreciable results have been obtained. However, some aspects such as low deposition rates and impurity incorporation into the films still remain as concerns in this area. The representative results on CVD of these metals are presented according to the type of metal organic complexes used.

Original languageEnglish
Pages (from-to)1717-1728
Number of pages12
JournalMaterials Transactions
Volume44
Issue number9
DOIs
Publication statusPublished - 2003 Sep

Keywords

  • Chemical vapor deposition
  • Metal organic complex
  • Noble metals
  • Platinum group metals

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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