TY - JOUR
T1 - Chemical structural analysis of diamondlike carbon films with different electrical resistivities by X-ray photoelectron spectroscopy
AU - Takabayashi, Susumu
AU - Okamoto, Keishi
AU - Shimada, Kenya
AU - Motomitsu, Kunihiko
AU - Motoyama, Hiroaki
AU - Nakatani, Tatsuyuki
AU - Sakaue, Hiroyuki
AU - Suzuki, Hitoshi
AU - Takahagi, Takayuki
PY - 2008/5/16
Y1 - 2008/5/16
N2 - The chemical structure of diamondlike carbon (DLC) has been clarified by means of the quantitative analysis of the C 1s X-ray photoelectron spectra of the DLC films with different electrical resistivities prepared by the unbalanced magnetron sputtering (UBMS) method. The observed C 1s spectra showed asymmetric shapes and shifts of peak positions depending on the electrical resistivity of the films. Every spectrum was decomposed into four chemical components that were represented by the Doniach-Šunjić (DŠ) function convoluted with a Gaussian function. The structures corresponding to the chemical components were analyzed by considering that the electrical resistivity of DLC increases as the amount of hydrogen increases. The assignments of the chemical components are as follows: in order of binding energy, sp3 carbon with carbon-carbon bonds (C-C sp3carbon, 283.7-283.8 eV), sp 2 carbon with carbon-carbon bonds (C-C sp2 carbon, 284.2-284.3 eV), sp2 carbon with hydrogen-carbon bonds (H-C sp 2 carbon, 284.7-284.8 eV), and sp3 carbon with hydrogen-carbon bonds (H-C sp3 carbon, 285.3-285.4eV).
AB - The chemical structure of diamondlike carbon (DLC) has been clarified by means of the quantitative analysis of the C 1s X-ray photoelectron spectra of the DLC films with different electrical resistivities prepared by the unbalanced magnetron sputtering (UBMS) method. The observed C 1s spectra showed asymmetric shapes and shifts of peak positions depending on the electrical resistivity of the films. Every spectrum was decomposed into four chemical components that were represented by the Doniach-Šunjić (DŠ) function convoluted with a Gaussian function. The structures corresponding to the chemical components were analyzed by considering that the electrical resistivity of DLC increases as the amount of hydrogen increases. The assignments of the chemical components are as follows: in order of binding energy, sp3 carbon with carbon-carbon bonds (C-C sp3carbon, 283.7-283.8 eV), sp 2 carbon with carbon-carbon bonds (C-C sp2 carbon, 284.2-284.3 eV), sp2 carbon with hydrogen-carbon bonds (H-C sp 2 carbon, 284.7-284.8 eV), and sp3 carbon with hydrogen-carbon bonds (H-C sp3 carbon, 285.3-285.4eV).
KW - Chemical structure
KW - Diamondlike carbon (DLC)
KW - Electrical resistivity
KW - Unbalanced magnetron sputtering (UBMS)
KW - X-ray photoelectron spectroscopy (XPS)
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U2 - 10.1143/JJAP.47.3376
DO - 10.1143/JJAP.47.3376
M3 - Article
AN - SCOPUS:50849090538
VL - 47
SP - 3376
EP - 3379
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 5 PART 1
ER -