Chemical structural analysis of diamondlike carbon films: II. Raman analysis

Susumu Takabayashi, Radek Ješko, Masanori Shinohara, Hiroyuki Hayashi, Rintaro Sugimoto, Shuichi Ogawa, Yuji Takakuwa

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

The chemical structure of diamondlike carbon (DLC) films, synthesized by photoemission-assisted glow discharge, has been analyzed by Raman spectroscopy. Raman analysis in conjunction with the sp2 cluster model clarified the film structure. The sp2 clusters in DLC films synthesized at low temperature preferred various aliphatic structures. Sufficient argon-ion assist allowed for formation of less strained DLC films containing large amounts of hydrogen. As the synthesis temperature was increased, thermal desorption of hydrogen left carbon dangling bonds with active unpaired electrons in the films, and the reactions that followed created strained films containing aromatic sp2 clusters. In parallel, the desorption of methane molecules from the growing surface by chemisorption of hydrogen radicals prevented the action of argon ions, promoting internal strain of the films. However, in synthesis at very high temperature, where sp2 clusters are sufficiently dominant, the strain was dissolved gradually. In contrast, the DLC films synthesized at low temperature were more stable than other films synthesized at the same temperature because of stable hydrogen–carbon bonds in the films.

Original languageEnglish
Pages (from-to)36-41
Number of pages6
JournalSurface Science
Volume668
DOIs
Publication statusPublished - 2018 Feb

Keywords

  • Diamondlike carbon (DLC)
  • Photoemission-assisted plasma-enhanced chemical vapor deposition (PA-PECVD)
  • Raman spectroscopy
  • The sp cluster model

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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