Chemical sensing system using plasma-synthesized organic films

Masayuki Nakamura, Iwao Sugimoto, Hiroki Kuwano

Research output: Contribution to journalArticlepeer-review


We have previously proposed plasma-synthesized-film-coated sensors and a chemical sensing system. The system uses an array of quartz crystal microbalances coated with films formed by radio-frequency sputtering. These sensors can detect a change in mass of only a few nanograms. To improve the selectivity of the system, it is important to develop films with various selectivities and signal processing for the sensor outputs. In this paper we propose new plasma-synthesized organic films and signal processing for the dynamic sensor response. This sensing system is applicable to a fire alarm system in telecommunication and computer facilities. We demonstrate that the sensor system can detect the gases emitted from burning polyvinyl chloride (PVC) cables and burning circuit boards. We also show the results of exposure tests in a computer room and a switching office.

Original languageEnglish
Pages (from-to)893-900
Number of pages8
JournalNTT R and D
Issue number9
Publication statusPublished - 1996 Dec 1
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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