We have previously proposed plasma-synthesized-film-coated sensors and a chemical sensing system. The system uses an array of quartz crystal microbalances coated with films formed by radio-frequency sputtering. These sensors can detect a change in mass of only a few nanograms. To improve the selectivity of the system, it is important to develop films with various selectivities and signal processing for the sensor outputs. In this paper we propose new plasma-synthesized organic films and signal processing for the dynamic sensor response. This sensing system is applicable to a fire alarm system in telecommunication and computer facilities. We demonstrate that the sensor system can detect the gases emitted from burning polyvinyl chloride (PVC) cables and burning circuit boards. We also show the results of exposure tests in a computer room and a switching office.
|Number of pages||8|
|Journal||NTT R and D|
|Publication status||Published - 1996 Dec 1|
ASJC Scopus subject areas
- Electrical and Electronic Engineering