A defect-free nanometer-scale silicon disk (nanodisk) on thin Si O2 film was precisely fabricated by using Cl neutral beam etching of a 3.5-4-nm -thick polycrystalline silicon on 1.4-3-nm -thick underlying Si O2 with a 7-nm -diameter ferritin iron core mask. Kelvin force microscope observations revealed that nanodisks could maintain injected positive and negative charges. Additionally, Coulomb staircases were observed by I-V measurement of a nanodisk at a temperature of 25 K. These results indicate that the nanodisk fabricated in this research had a precise quantum effect structure and attained the single electron property. This process has great potential in the development of future quantum effect devices.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)