Characterization of threading edge dislocation in 4H-SiC by X-ray topography and transmission electron microscopy

Yoshihiro Sugawara, Yong Zhao Yao, Yukari Ishikawa, Katsunori Danno, Hiroshi Suzuki, Takeshi Bessho, Satoshi Yamaguchi, Koichi Nishikawa, Yuichi Ikuhara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A threading dislocation (TD) in 4H-SiC, which was currently interpreted as a perfect threading edge dislocation (TED) by synchrotron monochromatic-beam X-ray topography (SMBXT) and molten KOH etching with Na2O2 additive, was investigated using weak-beam darkfield (WBDF) and large-angle convergent-beam electron diffraction (LACBED) methods. The TD was suggested to be dissociated into a dislocation pair which can be observed in the WBDF image of g=1210. The TD, which was identified as b//[1210] by SMBXT observation, was unambiguously determined as b=1/3[1210 ] by LACBED analysis. In the case of perfect TED, it was found that the direction of Burgers vector derived from SMBXT observation corresponds to LACBED analysis.

Original languageEnglish
Title of host publicationSilicon Carbide and Related Materials 2013
EditorsHajime Okumura, Hajime Okumura, Hiroshi Harima, Tsunenobu Kimoto, Masahiro Yoshimoto, Heiji Watanabe, Tomoaki Hatayama, Hideharu Matsuura, Yasuhisa Sano, Tsuyoshi Funaki
PublisherTrans Tech Publications Ltd
Pages366-369
Number of pages4
ISBN (Print)9783038350101
DOIs
Publication statusPublished - 2014
Externally publishedYes
Event15th International Conference on Silicon Carbide and Related Materials, ICSCRM 2013 - Miyazaki, Japan
Duration: 2013 Sep 292013 Oct 4

Publication series

NameMaterials Science Forum
Volume778-780
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Other

Other15th International Conference on Silicon Carbide and Related Materials, ICSCRM 2013
CountryJapan
CityMiyazaki
Period13/9/2913/10/4

Keywords

  • Burgers vector
  • Hexagonal SiC
  • Threading edge dislocation
  • Transmission electron microscopy
  • X-ray topography

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'Characterization of threading edge dislocation in 4H-SiC by X-ray topography and transmission electron microscopy'. Together they form a unique fingerprint.

Cite this