Characterization of thin ScAlN film based natural single-phase unidirectional SAW transducers using Sagnac interferometer

Abhay Kochhar, Tasuku Suzuki, Yasuo Yamamoto, Akihiko Teshigahara, Ken Ya Hashimoto, Shuji Tanaka, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Natural single-phase unidirectional surface acoustic wave transducers were reported previously for oriented quartz, LiNbO3, LiTaO3, La3Ga5SiO14 substrates, etc. However, the directionality in the thin piezoelectric films hasn't been reported elsewhere till recently by our group. The motivation to utilize the directionality in thin piezoelectric films was to improve the transducers or delay line's return loss effectively such that it can be utilized in integrated sensor applications. For characterization of directionality, in this paper we utilized Sagnac interferometer. We compared the forward and backward acoustic signals for propagation direction (i) parallel to the c-axis tilt and (ii) perpendicular to the c-axis tilt. The directionality produces higher acoustic signals on the backward direction as compared to the forward direction because of orientation being in that direction. But if the wave propagation is perpendicular to the c-axis tilt, the acoustic signals in either direction produce same power. Also, in this paper we report the delay line's return loss characteristics for open, PNR and short type of reflectors.

Original languageEnglish
Title of host publication2015 IEEE International Ultrasonics Symposium, IUS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479981823
DOIs
Publication statusPublished - 2015 Nov 13
EventIEEE International Ultrasonics Symposium, IUS 2015 - Taipei, Taiwan, Province of China
Duration: 2015 Oct 212015 Oct 24

Publication series

Name2015 IEEE International Ultrasonics Symposium, IUS 2015

Other

OtherIEEE International Ultrasonics Symposium, IUS 2015
CountryTaiwan, Province of China
CityTaipei
Period15/10/2115/10/24

Keywords

  • SAW IDT
  • piezoelectric thin film
  • sagnac interferometer
  • surface acoustic waves

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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    Kochhar, A., Suzuki, T., Yamamoto, Y., Teshigahara, A., Hashimoto, K. Y., Tanaka, S., & Esashi, M. (2015). Characterization of thin ScAlN film based natural single-phase unidirectional SAW transducers using Sagnac interferometer. In 2015 IEEE International Ultrasonics Symposium, IUS 2015 [7329526] (2015 IEEE International Ultrasonics Symposium, IUS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ULTSYM.2015.0138