Characterization of the electronic properties and strain sensitivity of graphene formed by C2H2 chemical vapor deposition

Meng Yang, Masato Ohnishi, Ken Suzuki, Hideo Miura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

We succeed in synthesizing large-area single-layer graphene sheets with different grain size using C2H2 chemical vapor deposition process. Our graphene shows high uniformity and low sheet resistance to 1080Ω/-. By fabricating graphenebased field effect transistors (FETs), the relation between the nucleation density and the electronic properties of CVD grpahene are investigated. We found that the nucleation density can severely affect the defects formation in graphene, leading to the change in the electronic properties of graphene. We also check the strain sensitivity of CVD graphene. The as-grown graphene/Cu film was fixed onto the SiO2/Si substrate with a double-sided tape. The strain device is fabricated directly on the graphene-coated Cu foils by using the standard photolithography and reactive ion etching (RIE) process. Then the device is transferred onto a stretchable and flexible polydimethysiloxane (PDMS) substrate. By using a motorized stage, the tensile test is performed to investigate the piezoresistive properties of graphene-based strain sensors. The one-dimensional tensile test is performed to investigate the piezoresistive properties. A gauge factor 3.4 was achieved under the tensile deformation.

Original languageEnglish
Title of host publicationMicro- and Nano-Systems Engineering and Packaging
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Electronic)9780791857533
DOIs
Publication statusPublished - 2015 Jan 1
EventASME 2015 International Mechanical Engineering Congress and Exposition, IMECE 2015 - Houston, United States
Duration: 2015 Nov 132015 Nov 19

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume10-2015

Other

OtherASME 2015 International Mechanical Engineering Congress and Exposition, IMECE 2015
Country/TerritoryUnited States
CityHouston
Period15/11/1315/11/19

ASJC Scopus subject areas

  • Mechanical Engineering

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