Characterization of submicron-scale periodic grooves by grazing incidence ultra-small-angle X-ray scattering

Yoshiyasu Ito, Katsuhiko Inaba, Kazuhiko Omote, Yasuo Wada, Susumu Ikeda

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

A grazing incidence ultra-small-angle X-ray scattering measurement system using a laboratory X-ray source has been developed. Submicron-scale artificial periodic grooves on thermally oxidized silicon wafers are characterized using this system. They are fabricated by electron beam lithography. The average pitch widths of the grooves are determined accurately with a low standard uncertainty of less than 0.02%. The cross-sectional profiles are also analyzed by intensity ratios of higher-order diffraction peaks from the periodic structures and X-ray reflectivity measurements. The obtained cross-sectional profiles are in good agreement with those obtained by atomic force microscopy.

Original languageEnglish
Pages (from-to)L773-L775
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume46
Issue number29-32
DOIs
Publication statusPublished - 2007 Aug 10
Externally publishedYes

Keywords

  • Critical dimension
  • Electron beam lithography
  • Graphoepitaxlal growth
  • Grazing incidence
  • Periodic groove
  • Small-angle X-ray scattering

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Characterization of submicron-scale periodic grooves by grazing incidence ultra-small-angle X-ray scattering'. Together they form a unique fingerprint.

  • Cite this