CHARACTERIZATION OF PVD FILMS WITH SCANNING ACOUSTIC MICROSCOPE.

Kazushi Yamanaka, Yuju Enomoto

Research output: Contribution to conferencePaperpeer-review

1 Citation (Scopus)
Original languageEnglish
Pages157-163
Number of pages7
Publication statusPublished - 1982 Dec 1

ASJC Scopus subject areas

  • Engineering(all)

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