Characterization of nanometer-sized Pt-dendrite structures fabricated on insulator Al2O3 substrate by electron-beam-induced deposition

Guoqiang Xie, Minghui Song, Kazutaka Mitsuishi, Kazuo Furuya

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    9 Citations (Scopus)

    Abstract

    Nanometer-sized Pt-dendrite structures were fabricated on an insulator Al2O3 substrate using an electron-beam-induced deposition (EBID) process in a transmission electron microscope (TEM). The as-fabricated structures were characterized using conventional and high-resolution transmission electron microscopies (CTEM and HRTEM) and X-ray energy dispersive spectroscopy (EDS). The as-fabricated nanodendrites consisted of many nano-grains and amorphous state structures. The nanometer-sized grains were determined to be Pt crystals with face-centered cubic (fcc) structure. The formation of the nanodendrite structures are discussed to relate to a mechanism involving charge-up produced on surface of the substrate, movement of charges to and accumulation at the convex surface of the substrate and the tips of the deposits.

    Original languageEnglish
    Pages (from-to)2567-2571
    Number of pages5
    JournalJournal of Materials Science
    Volume41
    Issue number9
    DOIs
    Publication statusPublished - 2006 May 1

    ASJC Scopus subject areas

    • Materials Science(all)
    • Mechanics of Materials
    • Mechanical Engineering

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