Characterization of metal nanoparticles fabricated in ordered array pores of anodic porous alumina by electron-beam-induced selective deposition

Guoqiang Xie, Minghui Song, Kazutaka Mitsuishi, Kazuo Furuya

    Research output: Contribution to journalArticlepeer-review

    17 Citations (Scopus)

    Abstract

    The ordered arrays of Au nanoparticles were fabricated by electron-beam-induced selective deposition process in an ordered pore arrays of anodic porous alumina membrane. The microstructure of the as-deposited nanoparticles was characterized using high-resolution transmission electron microscopy (HRTEM), energy dispersive X-ray spectroscopy (EDS) and microdiffraction technique. It was determined that the as-deposited nanoparticles consisted of many nanocrystallites of Au metal. The size of these nanocrystallites in the as-deposited nanoparticles was smaller than 5 nm.

    Original languageEnglish
    Pages (from-to)91-95
    Number of pages5
    JournalApplied Surface Science
    Volume241
    Issue number1-2 SPEC. ISS.
    DOIs
    Publication statusPublished - 2005 Feb 28

    Keywords

    • Anodic porous alumina
    • Electron-beam-induced deposition
    • HRTEM
    • Microdiffraction
    • Nanoparticle

    ASJC Scopus subject areas

    • Chemistry(all)
    • Condensed Matter Physics
    • Physics and Astronomy(all)
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films

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