TY - GEN
T1 - Characterization of low temperature chemical vapor deposited Gd 2O3 doped CeO2 films
AU - Saotome, Ryoichi
AU - Wakiya, Naoki
AU - Kiguchi, Takanori
AU - Cross, Jeffrey S.
AU - Sakurai, Osamu
AU - Shinozaki, Kazuo
PY - 2011
Y1 - 2011
N2 - Highly oriented and polycrystalline Gd2O3 doped CeO2 thin films were prepared on α-Al2O 3(0001) substrates by chemical vapor deposition, using Ce(C 5H4C2H5)3 and Gd(C 5H4C2H5)3 as precursors. The compositions of the films were controlled by optimizing the vaporization pressure of Gd precursor under the constant vaporization condition of Ce precursor. In-plane electrical conductivities of the films at various temperatures and oxygen partial pressures were evaluated by electrochemical impedance spectroscopy measurements. The activation energy of the film was determined as 0.94 eV, which is comparable with that of pulsed laser deposited films.
AB - Highly oriented and polycrystalline Gd2O3 doped CeO2 thin films were prepared on α-Al2O 3(0001) substrates by chemical vapor deposition, using Ce(C 5H4C2H5)3 and Gd(C 5H4C2H5)3 as precursors. The compositions of the films were controlled by optimizing the vaporization pressure of Gd precursor under the constant vaporization condition of Ce precursor. In-plane electrical conductivities of the films at various temperatures and oxygen partial pressures were evaluated by electrochemical impedance spectroscopy measurements. The activation energy of the film was determined as 0.94 eV, which is comparable with that of pulsed laser deposited films.
KW - Chemical vapor deposition
KW - Gadolinia doped ceria
KW - Solid oxide fuel cell
UR - http://www.scopus.com/inward/record.url?scp=79960591685&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79960591685&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/KEM.485.133
DO - 10.4028/www.scientific.net/KEM.485.133
M3 - Conference contribution
AN - SCOPUS:79960591685
SN - 9783037851821
T3 - Key Engineering Materials
SP - 133
EP - 136
BT - Electroceramics in Japan XIV
PB - Trans Tech Publications Ltd
ER -