Characterization of indium-tin oxide sputtering targets showing various densities of nodule formation

Takahisa Omata, Masao Kita, Hideya Okada, Shinya Otsuka-Yao-Matsuo, Naoki Ono, Hiroyuki Ikawa

Research output: Contribution to journalArticlepeer-review

41 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science

Chemical Compounds