Characterization of HfSiON gate dielectrics using monoenergetic positron beams

A. Uedono, K. Ikeuchi, T. Otsuka, K. Shiraishi, K. Yamabe, S. Miyazaki, N. Umezawa, A. Hamid, T. Chikyow, T. Ohdaira, M. Muramatsu, R. Suzuki, S. Inumiya, S. Kamiyama, Y. Akasaka, Y. Nara, K. Yamada

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23 Citations (Scopus)

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Physics & Astronomy