Characterization of eutectic wafer bonding using Gold and Silicon

Ikusei Rin, Mario Baum, Marco Haubold, Jörg Frömel, Maik Wiemer, Thomas Gessner, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
Original languageEnglish
Title of host publicationSmart Systems Integration 2009, SSI 2009
PublisherAKA Verlag
Pages56-63
Number of pages8
ISBN (Electronic)9783898386166
Publication statusPublished - 2009 Jan 1
EventSmart Systems Integration Conference 2009, SSI 2009 - Brussels, Belgium
Duration: 2009 Mar 102009 Mar 11

Publication series

NameSmart Systems Integration 2009, SSI 2009

Conference

ConferenceSmart Systems Integration Conference 2009, SSI 2009
CountryBelgium
CityBrussels
Period09/3/1009/3/11

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Science Applications
  • Computer Networks and Communications

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