Characterization of Epitaxial-PZT/SI Piezoelectric Micromachined Ultrasonic Transducer (PMUT) and its Phased Array System

Ziyi Liu, Shinya Yoshida, Toshiaki Horie, Shoji Okamoto, Ryouichi Takayama, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

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Physics & Astronomy

Mathematics

Engineering & Materials Science

Chemical Compounds