Characterization of DLC films by EELS and electron holography

Daisuke Shindo, Takayuki Musashi, Yoichi Ikematsu, Yasukazu Murakami, Norikazu Nakamura, Hiroshi Chiba

    Research output: Contribution to journalArticlepeer-review

    14 Citations (Scopus)

    Abstract

    Thickness measurements of diamond-like carbon (DLC) films by electron energy-loss spectroscopy (EELS) and electron holography are discussed. In order to evaluate the thickness by EELS and electron holography, the mean free path for inelastic scattering and mean inner potential of DLC films were determined precisely, respectively. It is found that both the mean free path for inelastic electron scattering and the mean inner potential are sensitive to the preparation methods, namely the density of DLC films. The present work has demonstrated that thickness measurement by EELS is available to DLC films thicker than 20 nm, while electron holography can be applied to thinner films (∼5 nm). Furthermore, close relations are observed between the density of DLC films and the energy-loss spectra.

    Original languageEnglish
    Pages (from-to)11-17
    Number of pages7
    JournalJournal of Electron Microscopy
    Volume54
    Issue number1
    DOIs
    Publication statusPublished - 2005 Jun 2

    Keywords

    • Electron energy-loss spectroscopy
    • Electron holography
    • Hologram
    • Mean free path for inelastic scattering
    • Mean inner potential
    • Transmission electron microscopy

    ASJC Scopus subject areas

    • Instrumentation

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