Characterization of deposited materials formed by focused ion beam-induced chemical vapor deposition using AuSi alloyed metal source

Takuma Yo, Hideaki Tanaka, Kakunen Koreyama, Takahiro Nagata, Yoshiki Sakuma, Kiyomi Nakajima, Toyohiro Chikyow, Junichi Yanagisawa, Akira Sakai

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2 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy